01.0 1 × 10-10 mbar to 2 bar (abs)

Mini UHV Gate Valve

The General Purpose Isolation Valve for Demanding Applications

01.2 1 × 10-7 mbar to 1 bar (abs)

Mini Gate Valve

The General Purpose Isolation Valve

08.1 1 × 10-7 mbar to 1.6 bar (abs)

Insertable Gate Valve

Where Installation Space is Limited (DN 63 - 100)

08.2 1 × 10-7 mbar to 1.6 bar (abs)

Insertable Gate Valve

Where Installation Space is Limited (DN 50)

09.1 1 × 10-8 mbar to 1.2 bar (abs)

HV Gate Valve with Wedge Design

The flexible Solution for Isolation of Gas-Streams with High By-Product Content

09.1 1 × 10-8 mbar to 1.2 bar (abs)

HV Gate Valve with Protection Ring

The Save Solution for Isolation of Gas-Streams with Very High By-Product Content

09.2 1 × 10-8 mbar to 1.2 bar (abs)

HV Gate Valve with Wedge Design

The Standard for Isolation of Gas-Streams with High By-Product Content

10.8 1 × 10-10 mbar to 1.2 bar (abs)

UHV Gate Valve

The Standard for UHV Isolation

11.1 1 × 10-8 mbar to 1.6 bar (abs)

HV Gate Valve

The Standard for High Vacuum Isolation

12.1 1 × 10-7 mbar to 1.6 bar (abs)

Gate Valve

The Standard for Vacuum Isolation

14.0

HV Gate Valve

For Standard High Cycle Vacuum Isolation

15.0 1 × 10-7 mbar to 1 bar (abs)

Isolation Gate Valve

Exceptionally Low Shock and Particle Count

15.1 1 × 10-8 mbar to 1 bar (abs)

HV Isolation Gate Valve

Exceptionally Low Shock and Particle Count

15.2 1 × 10-10 mbar to 1 bar (abs)

UHV Isolation Gate Valve

Exceptionally Low Shock and Particle Count

16.2 1 × 10-8 mbar to 1.2 bar (abs)

HV Pendulum Isolation Valve

The Standard for Isolation Requirements in Evaporator and Sputter Applications

16.8 1 × 10-8 mbar to 1.2 bar (abs)

Large HV Pendulum Isolation Valve

Compact Design for Large Vacuum Flows and Harsh Conditions

17.2 1 × 10-8 mbar to 2 bar (abs)

HV Gate Valve with Protective Ring

Reliable Under Harsh Conditions

19.0 1 × 10-7 mbar to 1 bar (abs)

Large Gate Valve

The Standard Where Large Diameters Are Required

19.1 1 × 10-8 mbar to 1 bar (abs)

Large HV Gate Valves

The Standard Where Large Diameters Are Required

19.2 1 × 10-10 mbar to 1 bar (abs)

Large UHV Gate Valve

The Standard Where Large Diameters Are Required

20.3 1 × 10-8 mbar to 2 bar (abs)

VATTERFLY Valve

Reliable Isolation in Contaminating and Aggressive Vacuum Processes

20.4 1 × 10-8 mbar to 2 bar (abs)

VATTERFLY Valve

Reliable Isolation in Contaminating and Aggressive Vacuum Processes (Extended Body Version)

21.0 1 × 10-8 mbar to 1.3 bar (abs)

Butterfly Valve

Reliable Vacuum Isolation in a Compact Design

24.4 1 × 10-7 mbar to 5 bar (abs)

Angle Valve

Uncompromised Reliability for Large Volume Flows

24.5 1 × 10-7 mbar to 5 bar (abs)

Inline Valve

Uncompromised Reliability for Large Volume Flows

25.0 1 × 10-8 mbar to 3 bar (abs)

HV Cylinder Valve (Angle Version)

Maximum Conductance for Harsh Process Environments

25.1 1 × 10-8 mbar to 3 bar (abs)

HV Cylinder Valve (Inline Version)

Maximum Conductance for Harsh Process Environments

25.2 1 × 10-8 mbar to 3 bar (abs)

HV Cylinder Valve (3/2 Way Version)

Maximum Conductance for Harsh Process Environments

25.7 Vacuum to 1.2 bar (abs)

HV Quick Shut-Off Valve

Perfect Backflow Protection

26.4 1 × 10-8 mbar to 2 bar (abs)

HV Angle Valve

Uncompromised Flexibility and Reliability

26.5 1 × 10-8 mbar to 5 bar (abs)

HV Inline Valve

Uncompromised Reliability

28.4 5 × 10-10 mbar to 5 bar (abs)

UHV Angle Valve

Outstandingly Low Outgassing Performance

29.0 1 × 10-8 mbar to 1.2 bar (abs)

HV Angle Valve with Soft-Pump Function

Pumping, Venting Without Turbulence or Pressure Pulses (DN 25 - 80)

29.1 1 × 10-8 mbar to 1.2 bar (abs)

HV Inline Valve with Soft-Pump Function

Pumping, Venting Without Turbulence or Pressure Pulses

29.2 1 × 10-7 mbar to 2 bar (abs)

HV Angle Valve with Soft-Pump Function

Avoids Turbulence or Condensation, Large Conductance Spectrum (DN 100 - 160)

47.1 XHV to 2 bar (abs)

XHV RF All-Metal Gate Valve

Reliable Sector Isolation for Storage Rings or Microwave Transmission Lines (DN 200)

47.2 XHV to 2 bar (abs)

XHV RF All-Metal Gate Valve

Reliable Sector Isolation for Storage Rings or Microwave Transmission Lines (DN 40 - 160)

48.1 XHV to 2 bar (abs)

XHV All-Metal Gate Valve

For High Temperatures (DN 16, 40, 200, 250, 320)

48.2 XHV to 2 bar (abs)

XHV All-Metal Gate Valve

For High Temperature (DN 63, 100, 160)

54.1 XHV to 2 bar (abs)

UHV/XHV All-Metal Angle Valve - Easy Close

For Extreme UHV Requirements

57.0 XHV to 5 bar (abs)

XHV All-Metal Angle Valve

For Extreme Temperature and Radiation Requirements (DN 63 - 160)

57.1 XHV to 5 bar (abs)

XHV All-Metal Angle valve

For Extreme Temperature and Radiation Requirements (DN 10 - 40)

FAQ Vacuum Isolation Valves

What are vacuum isolation valves?
A vacuum isolation valve is a type of vacuum valve designed to isolate a section of a vacuum system from the rest of the system. The purpose of the valve is to prevent gas or air from entering or leaving the isolated section, thereby maintaining the vacuum level in that section.
How does a vacuum isolation valve work?
Vacuum isolation valves work by using a mechanism to physically block the flow of gas or air. In contrast to vacuum valves, which have a pure gas flow regulating function, for example. This mechanism can vary according to the application. The isolation is achieved by either pushing, rotating or swinging a gate into the flow path. A key characteristic of high performance vacuum isolation valves is to do this with nearly no vibration or friction even at very fast opening and closing speeds. A vacuum isolation valve is typically made of aluminum or stainless steel with an elastomer sealing. To withstand harsh operation conditions like high temperatures, radiation or aggressive media isolation valves can also be made fully of metall. Also in ultra high and extreme high vacuum applications all-metal isolation valves with hard-on-hard sealing are preferred as elastomer sealing as they provide better sealing performance and durability.
What are some common applications for vacuum isolation valves?
Vacuum isolation valves are used in a wide range of applications, including semiconductor manufacturing, vacuum coating, research and development, and many other industries that require a controlled vacuum environment.
What are some important factors to consider when selecting a vacuum isolation valve?
When selecting a vacuum isolation valve, it's important to consider factors such as the material of the vacuum valve body and sealing mechanism, the valve size and flow rate, the required level of vacuum, and any special requirements for the application.
How can I maintain and troubleshoot a vacuum isolation valve?
To maintain and troubleshoot a vacuum isolation valve, it's important to follow the manufacturer's instructions and guidelines. Regular maintenance can help to prevent issues such as leaks or blockages, and troubleshooting may involve checking for wear and tear on the vacuum valve components, cleaning or replacing parts as needed, and performing tests to ensure proper valve function. If in doubt, consult a vacuum system expert for assistance.