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16.8 Large HV Pendulum Isolation Valve
Compact Design for Large Vacuum Flows and Harsh Conditions
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Reliable Isolation Under All Conditions
The 16.8 Large HV Pendulum Isolation Valve provides reliable isolation performance also under harsh process conditions. It is ideal for isolation requirements in applications with large volume flows such as large coating or display production systems. Therefore, it is offered in DN 400 and 500mm. The 16.8 valve provides optional a 3-position pneumatic or a standard pneumatic, both double acting.
With its special split body design it allows maintenance without any disassembly of pipe connections or process chamber connections. Its slim design allows to mount the 16.8 directly to a process chamber, eliminating e.g. the volume normally required in a chamber - valve - pump connection.
With its robust design as well as a variety of design options, the 16.8 series is easy to integrate into various vacuum processes.
Already installed in hundreds of batch and inline production systems around the world under various process conditions, the 16.8 series has proven its outstanding performance in all aspects.
The 16.8 Large HV Pendulum Isolation Valve is available in aluminum with standard flange connectors in ISO-F and JIS. Customer-specific flanges can be integrated. Further options are ports for roughing (by-pass), venting or for gauges. As the 16.8 is often used to isolate turbo pumps a splinter shield grid is also available.
Key features of the 16.8 Large HV Pendulum Isolation Valve
Features:
- Reliable isolation for large vacuum volumes
- Reliable performance also under harsh conditions
- Quick and easy maintenance through slit body design
Benefits:
- High uptime
- Low cost of operation
- Adjustable to process requirements
Technical data
| Sizes | DN 400 (16"), DN 457 (16"), DN 500 (20") | |
|---|---|---|
| Actuators | Pneumatic | Double acting |
| 3-position-pneumatic | Double acting | |
| Body material | Aluminum | |
| Feedthrough | Rotary feedthrough | |
| Standard flanges | ISO-F, ASA, JIS | |
| Leak rate | Valve body, valve seat | < 1 × 10-9 mbar ls-1 |
| Pressure range | 1 × 10-8 mbar to 1.2 bar (abs) | |
| Differential pressure on the plate | ≤ 1.2 bar | |
| Differential pressure at opening | ≤ 30 mbar | |
| Cycles until first service | 100 000 | |
| Temperature | Valve body Actuator Solenoid valve Position indicator |
≤ 120 °C ≤ 80 °C ≤ 50 °C ≤ 80 °C |
| Heating and cooling rate | ≤ 30 °C h-1 | |
| Material | Valve body Plate Feedthrough (parts in contact with media) |
EN AC-421000 (3.2371) EN AW-6082 (3.2315) EN AW-6082 (3.2315), AISI 303 (1.4305) |
| Seal | Bonnet, plate, feedthrough | FKM (Viton®) |
| Mounting position | Any | |
| Solenoid valve | 24 V DC, 5.4 W (others on request) | |
| Position indicator: contact rating | Voltage Current |
≤ 50 V AC/DC ≤ 3 A |
| Valve position indication | Visual (mechanical) |
