Sub-Fab Systems
Sub-fab processes can be challenging: corrosive, abrasive, and toxic gases and/or condensation and high levels of by-products in the gas stream can al...
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Reliable Isolation Under All Conditions
The 12.1 Gate Valve is equipped with VATLOCK technology, specially developed to provide reliable sealing without any friction, which avoids the generation of particles.
Already installed in thousands of demanding applications under various process conditions, the 12.1 series has proven its outstanding reliability. It has become the standard solution for vacuum isolation in pressure ranges up to < 10-7 mbar, e. g. in connection with turbo molecular pumps.
With a robust design and direct mounting option, as well as reduced and easy maintenance due to its split body, the 12.1 series easily meets all standard requirements.
Various design options in actuation, flange connections or additional vacuum ports make it easy to integrate in any vacuum application.
A key feature of the 12.1 series is that it is locked in closing position, eliminating any risk of vacuum loss due to pneumatic failure.
12.1 Gate Valves are available as manual and pneumatic versions with solenoid valve, either as an onboard solution or for external mounting. Solenoid valve standard voltage is 24 VDC, with other voltages available on request. The valve position is indicated by mechanical or electrical position indicators.
Standard options for flange connectors are ISO-F and JIS. Customer-specific flanges can be integrated, as well as special features, e. g. a shutter for laser applications (as gate without seal).
The standard gate sealing is provided by an O-ring seal in FKM andother sealing materials are available on request.
Key features of the 12.1 Gate Valve
Features:
- Reliable, proven design
- Free of lubricants
- VATLOCK technology with fail-safe prevention
- Mechanically locked in closing position
Benefits:
- Reliable performance
- Split body for easy cleaning
- Low cost of ownership
Technical data
| Sizes | DN 63 (2½’’), DN 80 (3"), DN 100 (4"), DN 160 (6"), DN 200 (8"), DN 250 (10"), DN 320 (12") |
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|---|---|---|---|
| Actuator | Pneumatic | Double acting | |
| Manual | With push rod | ||
| Body Material | Aluminum | ||
| Feedthrough | Shaft | ||
| Standard Flanges | ISO-F, JIS | ||
| Leak Rate | Valve Body | < 1 × 10-9 mbar ls-1 | |
| Valve Seat | < 1 × 10-9 mbar ls-1 | ||
| Pressure Range | 1 × 10-7 mbar to 1.6 bar (abs) (DN 63 – 200) 1 × 10-7 mbar to 1.2 bar (abs) (DN 250 – 320) |
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| Differential Pressure | On the Gate | ≤ 1.6 bar (DN 63 – 200) ≤ 1.2 bar (DN 250 – 320) |
|
| At Opening | ≤ 30 mbar | ||
| Cycles until first Service | 200 000 (DN 63 – 100) 100 000 (DN 160 – 320) |
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| Temperature | Valve Body | ≤ 120 °C | |
| Actuator | ≤ 80 °C | ||
| Solenoid Valve | ≤ 50 °C | ||
| Position Indicator | ≤ 80 °C | ||
| Heating and Cooling Rate | ≤ 30 °C h-1 | ||
| Material | Valve Body | EN AW-5083 (3.3547, EN AW-6061 (3.3211) (DN 63 – 100) EN AC-42100 (3.2371) (DN 160 – 320) |
|
| Mechanism | AISI 304 (1.4301) (DN 63 – 100) EN AW-6082 (3.2315) (DN 160 – 320) |
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| Seal | Bonnet, Gate | FKM (Viton®) | |
| Mounting Position | Any | ||
| Solenoid Valve | 24 VDC, 5.4 W (others on request) | ||
| Position Indicator: Contact Rating | Voltage | ≤ 250 VAC | ≤ 50 VDC |
| Current | ≤ 2 A | ≤ 1.2 A | |
| Valve Position Indication | Visual (Mechanical) | ||
