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Vacuum Valves
Vacuum Transfer Doors

Vacuum Transfer Doors

Seals, unlike a transfer valve, only one vacuum chamber for loading or processing. The other side of the door is therefore always under atmospheric pressure. All VAT solutions are tailored to the respective application.

Size (mm)

35 x 336 mm (1.38" x 13.23")46 x 236 mm (1,8" x 9,3")50 x 336 mm (1.97" x 13.2")50 x 420 mm (1.97" x 16.5")65 x 420 mm (2.56" x 16.5")

Flange type

DoorDoor, parallel to mounting surface

Valve Function

Isolation onlySubstrate Transfer

Actuation

Pneumatic: double acting

06.6 - Large Transfer Valve / Insert / Door with SOLVAT

06.6

Large Transfer Valve / Insert / Door with SOLVAT

High Performance for PV and Large Coating Systems

06.8 - Large Transfer Valve / Insert / Door with FLAPVAT

06.8

Large Transfer Valve / Insert / Door with FLAPVAT

High Performance for PV and Large Coating Systems

07.0 - HV Transfer Door Insert with LINVAT

07.01 × 10^-10 mbar to 1 bar (abs)

HV Transfer Door Insert with LINVAT

High Performance for EFEM and Load Lock Applications

07.7 - Large Transfer Door Insert with L-VAT

07.7

Large Transfer Door Insert with L-VAT

Exceptional Performance for Display and PV Production Systems

VAT is a global leader in the development of high vacuum solutions that are essential for the production of semiconductors, displays, and digital technologies.

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