Suggested Items

View all results

Latest news

Sep 10, 2025 Events

SEMICON Taiwan 2025

Meet us from Sept 10-12 in Taipei at Nangang Exhibition Center, TaiNEX1, hall 1 4F, booth number M0942.

Sep 4, 2025 Events

CSEAC 2025

Meet us from Sept 4-6 in China at Wuxi Taihu International Expo Center, hall A6, booth number 468.

Sep 2, 2025 Events

SEMICON India 2025

Meet us from Sept 2-4 in New Delhi at Yashobhoomi (IICC), hall 1, booth number 1472.

Aug 7, 2025 Company

VAT becomes co-sponsor and marketing partner of Hockey Club Davos (HCD)

About VAT
Vacuum Valves productsOverview
Other products
SolutionsOverview
- SemiconductorOverview
- DisplayOverview
- Scientific instruments and medical
  - Medical and Pharmaceutical Applications
  - Scientific Instruments
- Coating
- IndustryOverview
- Power GenerationOverview
  - Solar Thin Film Deposition
  - Sub-Fab Systems
- ResearchOverview
  - Space Simulation
  - High Energy Physics
- Your application
ServicesOverview
Sustainability
Investor RelationsOverview
Careers
Supply Chain Management
Downloads
Contact

English

Deutsch
English
日本語
中文

Home
Vacuum Valves
Gas Dosing / Leak Valves

Gas Dosing / Leak Valves

To control volume flows even in the overpressure range. Feature: Very precise controllability of gas flows.

Size (mm)

DN 5 (1/5")DN 10 (⅜")DN 16 (⅝")DN 25 (1")DN 40 (1 ½")

Flange type

CF-R (rotatable flange)ISO-KFSpecialSpecific

Valve Function

Gas Dosing

Actuation

ElectromagneticManualRS232 interface / 1 sensorStepper motor

Controller

Basic Version / Cluster Slave

21.1 - Gas Dosing Valve

21.11 × 10^-7 mbar to 4 bar (abs)

Gas Dosing Valve

Controlled, Reproducible Gas Flow for Vacuum Chambers

22.0 - Diaphragm Valve

22.01 × 10^-7 mbar to 5 bar (abs)

Diaphragm Valve

The Multipurpose Solution for Gases and Liquids

59.0 - UHV All-Metal Variable Leak Valve

59.0UHV to 10 bar (abs)

UHV All-Metal Variable Leak Valve

For Extreme UHV Requirements

62.7 - Gas Dosing Valve

62.71 × 10^-8 mbar to 2 bar (abs)

Gas Dosing Valve

Outstanding Controllability of Gas Flows for Vacuum Chambers

62.8 - HV Gas Dosing Valve

62.8

HV Gas Dosing Valve

Outstanding Controllability of Pressure in Vacuum Chambers through the Gas Flow

VAT is a global leader in the development of high vacuum solutions that are essential for the production of semiconductors, displays, and digital technologies.

English

Deutsch
English
日本語
中文

VAT on LinkedIn

Imprint |
Privacy Policy |
General terms and conditions |
2025 VAT Group AG | Switzerland