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Reliable and Precise Control for Ultra-High Vacuum Processes
The 64.8 UHV Control Gate Valve series is designed for reliable, precise control and isolation in ultra-high vacuum processes in applications like sputtering or EUV in semiconductor production. It addresses the standard requirements of durability, modularity, leak tightness and serviceability with a special focus on high uptime and low cost of ownership.
The 64.8 is equipped with VATLOCK technology, which provides reliable sealing without any friction at the plate. The plate acts as a throttling element and varies the conductance of the valve opening. The onboard pressure controller calculates the required plate position to achieve the set point pressure. A stepper motor performs the actuation. An encoder monitors the plate position. This ensures a fast and accurate process pressure control. The special VATLOCK lock-in mechanism in the close position guaranties leak tight isolation combined with failsafe closing in case of power loss.
Ultra-high vacuum performance is reached through metal bonnet sealing and a bellows sealed feedthrough as well as a vulcanized plate seal (O-ring as an option).
Already installed in thousands of demanding applications under various process conditions, the 64.8 has proven its outstanding reliability. With its robust, lubricant-free design, it meets all of the requirements for a high cycle vacuum control gate valve.
The 64.8 UHV Control Gate Valve is available in different design options in sealing material, flange connections, ports for roughing (by-pass), venting or gauges as well as special control algorithms (adaptive, fix PI down-stream/soft-pump) to simplify its integration into various vacuum applications. The controller can also be mounted separately from the valve.
The series is available in sizes from DN 200 - 250mm (8” - 10”), while sizes for DN 160 (6") and DN 320 (12") are available on request.
Key features of the 64.8 UHV Control Gate Valve
Features:
- Reliable, proven design for UHV
- Lubricant free
- VATLOCK technology
- Robust stainless steel body
Benefits：
- Reliable and precise control and isolation
- Extended maintenance free cycle
- Low cost of ownership
Technical data
| Sizes | DN 160 (6"), DN 200 (8"), DN 250 (10"), DN 320 (12") | ||
|---|---|---|---|
| Actuator | Integrated pressure controller with closed loop-controlled stepper motor | ||
| Body Material | Stainless steel | ||
| Feedthrough | Bellows feedthrough | ||
| Standard Flanges | ISO-F, CF-F, ASA-LP/ASA, JIS | ||
| Leak Rate | Valve Body Valve Seat |
< 5 × 10-10 mbar ls-1 < 1 × 10-9 mbar ls-1 |
|
| Pressure Range | DN 160-200 DN 250 DN 320 |
1 × 10-10 mbar to 1.6 bar (abs) 1 × 10-10 mbar to 1.2 bar (abs) 1 × 10-6 mbar to 1.2 bar (abs) |
|
| Differential Pressure on the Gate | DN 160-200 DN 250-320 |
≤ 1.6 bar ≤ 1.2 bar |
|
| Differential Pressure at Opening | ≤ 30 mbar | ||
| Cycles until first Service1) | Throttling (open –max. open) Isolation (open – close – open) |
100 000 30 000 |
|
| Temperature | Valve Body Controller |
≤ 80°C Max. 50°C (≤ 35 °C recommended) |
|
| Material | Valve Body Mechanism Bellows |
AISI 304 (1.4301) DN 160-200 - AISI 316L (1.4404) DN 250 - AISI 304 (1.4301) AISI 316L (1.4404, 1.4435) |
|
| Seal | Bonnet Gate |
Metal FKM |
|
| Mounting Position | DN 160-250 DN 320 |
Any Horizontal |
|
| Valve Position Indication | Visual (Mechanical and on Controller) | ||
1) Maximum values depending on operating conditions and sealing materials
