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Series

65.3 HV Pendulum Control Valve

  • 65348-PHCH

Series

65.3 HV Pendulum Control Valve

Article number
65348-PHCH
1 × 10-8 mbar to 1 bar (abs)

Optimized Downstream Pressure Control & Vacuum Isolation in SEMI & Display Systems

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Size
DN 250 (10")
Flange
ISO-F
Material
Aluminum hard anodized
Actuator
Stepper motor
Position Indication Signal
No
Solenoid
No
Pressure Min.
1 × 10-6 mbar
Pressure Max.
1.2 bar (abs)
Differential Pressure on Plate
≤ 1 bar
Differential Pressure at opening
≤ 1 bar
Conductance
22000 ls⁻¹
Min. compressed air pressure
4 bar / 58 psi
Max. compressed air pressure
7 bar / 102 psi
Max. temperature valve body
≤ 120 °C
Open to close
3 s
Close to open
4 s
Pressure control (throttling) default speed
0.9 s
Pressure control (throttling) fast speed
0.5 s
Controller Configuration
SPS and PFO
Weight
29 kg / 64 lbs
Controller interface + sensors
RS232 interface / 2 sensors
Add-Ons for Your Product
Valve
Gate
Actuator
Temperature Management

Accessories – Flange connections:

Spare Parts

Please specify your spare part need at the end of your selection process, on the next page.

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