Thin Film Coating
A number of different processes are used for thin film coating processes, e.g. CVD, PVD, MOCVD or PECVD. All processes have in common that they take p...
Read moreThe key performance indicators for angle/inline valves are reliability and variability. The 21.4 Mini Angle/Inline Valve series combines both. Tested in thousands of demanding applications under various process conditions the 21.4 series has proven its outstanding reliability. With its electromagnetic actuator, it’s especially suited for sealing and venting requirements in applications with no access to compressed air. It’s available in angle or inline design and comes with a wide range of accessories of flange connectors and adapters to fit nearly every requirement.
Based on a reliable and robust core design the 21.4 Mini Angle/Inline Valve is available in DN 5 with ISO-KF flange and adapters for DN 4, 8, 10 as well as pipe connectors for OD ¼" and OD 6. The electromagnetic actuator is laid out for two million cycles.
Leak Rate | < 1 × 10-9 mbar ls-1 | |
---|---|---|
Pressure Range | Electromagnetic Actuator | 1 × 10-8 mbar to 10 bar (abs) |
Cycles until first Service | Electromagnetic Actuator | 2 Million |
Temperatur | Electromagnetic Actuator | ≤ 40 °C |
Material | Body, Bellows, Plate | AISI 304 |
Seal | FKM (VITON®) | |
Feedthrough | Electromagnetic Actuator | O-Ring sealed shaft feedthrough |
Mounting Position | Any |