21.1 1 × 10-7 mbar to 4 bar (abs)

Gas Dosing Valve

Controlled, Reproducible Gas Flow for Vacuum Chambers

22.0 1 × 10-7 mbar to 5 bar (abs)

Diaphragm Valve

The Multipurpose Solution for Gases and Liquids

59.0 UHV to 10 bar (abs)

UHV All-Metal Variable Leak Valve

For Extreme UHV Requirements

62.7 1 × 10-8 mbar to 2 bar (abs)

Gas Dosing Valve

Outstanding Controllability of Gas Flows for Vacuum Chambers