Precision & Stability

The VAT vacuum valve portfolio for thin film coating processes is designed for precise, stable operation even under changing process conditions. Key features include precise gas flow control even at low conductance levels, minimized residual gas and particulate emissions, and a modular design that allows the required vacuum valves to be optimally configured to meet specific process requirements.

To learn more about how a VAT vacuum valve solution can solve challenges in thin film coating processes, please select from the products below.

Relevant Series

HV Transfer Valve with L-VAT

04.2

1 × 10-9 mbar to 1.2 bar (abs)

HV Transfer Valve with L-VAT

For Load Lock and Process Chamber Isolation

HV Transfer Valve Insert with L-MOTION

05.3

1 × 10-9 mbar to 1.1 bar (abs)

HV Transfer Valve Insert with L-MOTION

Fast and Precise, Particularly Suited to Corrosive Processes

Large Transfer Valve / Insert with TWINVAT

06.1

Large Transfer Valve / Insert with TWINVAT

High Performance for Display Production Systems

Large Transfer Valve / Insert with TWINVAT

06.3

Large Transfer Valve / Insert with TWINVAT

High Performance for Display Production Systems - Atmospheric Pressure Version

Large Transfer Valve / Insert / Door with SOLVAT

06.6

Large Transfer Valve / Insert / Door with SOLVAT

High Performance for PV and Large Coating Systems

Large Transfer Valve / Insert / Door with FLAPVAT

06.8

Large Transfer Valve / Insert / Door with FLAPVAT

High Performance for PV and Large Coating Systems

HV Transfer Door Insert with LINVAT

07.0

HV Transfer Door Insert with LINVAT

High Performance for EFEM and Load Lock Applications

UHV Gate Valve

10.8

1 × 10-10 mbar to 1.2 bar (abs)

UHV Gate Valve

The Standard for UHV Isolation

Gate Valve

12.1

1 × 10-7 mbar to 1.6 bar (abs)

Gate Valve

The Standard for Vacuum Isolation

HV Gate Valve

14.0

HV Gate Valve

For Standard High Cycle Vacuum Isolation

Isolation Gate Valve

15.0

1 × 10-7 mbar to 1 bar (abs)

Isolation Gate Valve

Exceptionally Low Shock and Particle Count

HV Isolation Gate Valve

15.1

1 × 10-8 mbar to 1 bar (abs)

HV Isolation Gate Valve

Exceptionally Low Shock and Particle Count

UHV Isolation Gate Valve

15.2

1 × 10-10 mbar to 1 bar (abs)

UHV Isolation Gate Valve

Exceptionally Low Shock and Particle Count

Large HV Pendulum Isolation Valve

16.8

1 × 10-8 mbar to 1.2 bar (abs)

Large HV Pendulum Isolation Valve

Compact Design for Large Vacuum Flows and Harsh Conditions

VATTERFLY Valve

20.3

1 × 10-8 mbar to 2 bar (abs)

VATTERFLY Valve

Reliable Isolation in Contaminating and Aggressive Vacuum Processes

Gas Dosing Valve

21.1

1 × 10-7 mbar to 4 bar (abs)

Gas Dosing Valve

Controlled, Reproducible Gas Flow for Vacuum Chambers

Venting Valve

21.3

1 × 10-8 mbar to 1 bar (abs)

Venting Valve

Controlled Venting of Vacuum Systems

Mini Angle / Inline Valve

21.4

1 × 10-8 mbar to 10 bar (abs)

Mini Angle / Inline Valve

Uncompromised Reliability for Sealing or Venting Without Compressed Air

Angle Valve

24.4

1 × 10-7 mbar to 5 bar (abs)

Angle Valve

Uncompromised Reliability for Large Volume Flows

Inline Valve

24.5

1 × 10-7 mbar to 5 bar (abs)

Inline Valve

Uncompromised Reliability for Large Volume Flows

HV Cylinder Valve (Angle Version)

25.0

1 × 10-8 mbar to 3 bar (abs)

HV Cylinder Valve (Angle Version)

Maximum Conductance for Harsh Process Environments

HV Angle Valve

26.4

1 × 10-8 mbar to 2 bar (abs)

HV Angle Valve

Uncompromised Flexibility and Reliability

HV Inline Valve

26.5

1 × 10-8 mbar to 5 bar (abs)

HV Inline Valve

Uncompromised Reliability

UHV Angle Valve

28.4

5 × 10-10 mbar to 5 bar (abs)

UHV Angle Valve

Outstandingly Low Outgassing Performance

HV Angle Valve with Soft-Pump Function

29.0

1 × 10-8 mbar to 1.2 bar (abs)

HV Angle Valve with Soft-Pump Function

Pumping, Venting Without Turbulence or Pressure Pulses (DN 25 - 80)

HV Inline Valve with Soft-Pump Function

29.1

1 × 10-8 mbar to 1.2 bar (abs)

HV Inline Valve with Soft-Pump Function

Pumping, Venting Without Turbulence or Pressure Pulses

UHV All-Metal Variable Leak Valve

59.0

UHV to 10 bar (abs)

UHV All-Metal Variable Leak Valve

For Extreme UHV Requirements

HV Butterfly Control Valve

61.3

1 × 10-8 mbar to 1.2 bar (abs)

HV Butterfly Control Valve

Fast, Precise Downstream Pressure Control

HV Butterfly Control and Isolation Valve

61.6

1 × 10-8 mbar to 1.2 bar (abs)

HV Butterfly Control and Isolation Valve

Fast, Precise Downstream Pressure Control and Isolation

HV Butterfly Control Valve

61.7

HV Butterfly Control Valve

Outstanding Controllability with Exceptionally Low Conductance

HV Angle Control Valve

62.0

1 × 10-8 mbar to 1.4 bar (abs)

HV Angle Control Valve

The High Pressure and High Temperature Solution

Gas Dosing Valve

62.7

1 × 10-8 mbar to 2 bar (abs)

Gas Dosing Valve

Outstanding Controllability of Gas Flows for Vacuum Chambers

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