Vacuum valve solutions for mass spectrometry or gas analysis are usually tailor-made. Based on selected VAT basic technologies, we develop the optimal solution for the specific application in terms of technical parameters such as conductance, tightness, actuation, degree of outgassing and freedom from particles, temperature resistance and foot print requirements. 

To learn more about how a VAT vacuum valve solution can help with specific mass spectrometry and gas analysis valve tasks, please select a specific product below.

Relevant Series

Mini UHV Gate Valve

01.0

1 × 10-10 mbar to 2 bar (abs)

Mini UHV Gate Valve

The General Purpose Isolation Valve for Demanding Applications

Mini Gate Valve

01.2

1 × 10-7 mbar to 1 bar (abs)

Mini Gate Valve

The General Purpose Isolation Valve

Insertable Gate Valve

08.1

1 × 10-7 mbar to 1.6 bar (abs)

Insertable Gate Valve

Where Installation Space is Limited (DN 63 - 100)

Insertable Gate Valve

08.2

1 × 10-7 mbar to 1.6 bar (abs)

Insertable Gate Valve

Where Installation Space is Limited (DN 50)

UHV Gate Valve

10.8

1 × 10-10 mbar to 1.2 bar (abs)

UHV Gate Valve

The Standard for UHV Isolation

UHV Isolation Gate Valve

15.2

1 × 10-10 mbar to 1 bar (abs)

UHV Isolation Gate Valve

Exceptionally Low Shock and Particle Count

VATTERFLY Valve

20.3

1 × 10-8 mbar to 2 bar (abs)

VATTERFLY Valve

Reliable Isolation in Contaminating and Aggressive Vacuum Processes

Butterfly Valve

21.0

1 × 10-8 mbar to 1.3 bar (abs)

Butterfly Valve

Reliable Vacuum Isolation in a Compact Design

Gas Dosing Valve

21.1

1 × 10-7 mbar to 4 bar (abs)

Gas Dosing Valve

Controlled, Reproducible Gas Flow for Vacuum Chambers

Venting Valve

21.3

1 × 10-8 mbar to 1 bar (abs)

Venting Valve

Controlled Venting of Vacuum Systems

Mini Angle / Inline Valve

21.4

1 × 10-8 mbar to 10 bar (abs)

Mini Angle / Inline Valve

Uncompromised Reliability for Sealing or Venting Without Compressed Air

Angle Valve

24.4

1 × 10-7 mbar to 5 bar (abs)

Angle Valve

Uncompromised Reliability for Large Volume Flows

Inline Valve

24.5

1 × 10-7 mbar to 5 bar (abs)

Inline Valve

Uncompromised Reliability for Large Volume Flows

HV Angle Valve

26.4

1 × 10-8 mbar to 2 bar (abs)

HV Angle Valve

Uncompromised Flexibility and Reliability

HV Inline Valve

26.5

1 × 10-8 mbar to 5 bar (abs)

HV Inline Valve

Uncompromised Reliability

UHV Angle Valve

28.4

5 × 10-10 mbar to 5 bar (abs)

UHV Angle Valve

Outstandingly Low Outgassing Performance

HV Angle Valve with Soft-Pump Function

29.0

1 × 10-8 mbar to 1.2 bar (abs)

HV Angle Valve with Soft-Pump Function

Pumping, Venting Without Turbulence or Pressure Pulses (DN 25 - 80)

HV Inline Valve with Soft-Pump Function

29.1

1 × 10-8 mbar to 1.2 bar (abs)

HV Inline Valve with Soft-Pump Function

Pumping, Venting Without Turbulence or Pressure Pulses

XHV All-Metal Gate Valve

48.1

XHV to 2 bar (abs)

XHV All-Metal Gate Valve

For High Temperatures (DN 16, 40, 200, 250, 320)

XHV All-Metal Gate Valve

48.2

XHV to 2 bar (abs)

XHV All-Metal Gate Valve

For High Temperature (DN 63, 100, 160)

UHV/XHV All-Metal Angle Valve - Easy Close

54.1

XHV to 2 bar (abs)

UHV/XHV All-Metal Angle Valve - Easy Close

For Extreme UHV Requirements

XHV All-Metal Angle Valve

57.0

XHV to 5 bar (abs)

XHV All-Metal Angle Valve

For Extreme Temperature and Radiation Requirements (DN 63 - 160)

XHV All-Metal Angle valve

57.1

XHV to 5 bar (abs)

XHV All-Metal Angle valve

For Extreme Temperature and Radiation Requirements (DN 10 - 40)

UHV All-Metal Variable Leak Valve

59.0

UHV to 10 bar (abs)

UHV All-Metal Variable Leak Valve

For Extreme UHV Requirements

Gas Dosing Valve

62.7

1 × 10-8 mbar to 2 bar (abs)

Gas Dosing Valve

Outstanding Controllability of Gas Flows for Vacuum Chambers

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