The VAT transfer valve portfolio for substrate transfer is designed for precise, stable operation even under changing process conditions. Each series is always adapted to the specific customer requirements in all performance parameters. Key features include adjustable opening and closing cycles, a precise adaptive sealing that avoids overpressing, frictionless L-motion from one or two actuators, and the prevention of particle activation.
To learn more about how a VAT transfer valve solution can solve substrate transfer challenges, select from the series listed below.
