The VAT vacuum valve portfolio for control and isolation in semiconductor manufacturing is always tailored to the special requirement. Depending on the requirement and area of application, the performance parameters of the individual series and valve technologies used are always adapted to the specific customer needs in each case. Key features include adaptable opening and closing cycles, stable adaptive sealing, advanced controller technology that allows high-precision control, particle activation and release prevention, and high manufacturing quality that guarantees defined, stable performance parameters for each valve manufactured.
To learn more about how a VAT vacuum valve solution can solve control and isolation challenges, select from the series listed below.
