Field-proven Technology
The VAT vacuum valve portfolio for crystal growing consists of field-proven valve concepts with a special focus on preventing particle activation and emission. The control valves are characterized by particularly precise and fine controllability, with which reliable process control is possible even at low conductance values. High availability with generally minimal maintenance requirements complement the performance features.
To learn more about how a VAT vacuum valve solution can help solve specific crystal growth challenges, please select from the products listed below.